Applications

Semiconductors

High purity, extreme corrosion resistance, no particle generation, electrical conductivity, and good mechanical properties make SIGRADUR® glassy carbon an ideal material for semiconductor production. SIGRADUR® glassy carbon crucibles and boats are used for zone melting of semiconductor components, gallium arsenide synthesis, and monocrystal growth by the Bridgman or Czochralsky method. Due to its extreme resistance, SIGRADUR® glassy carbon can also be used to construct parts in ion implanting systems and can be made into electrodes for plasma etching systems. The high X-ray transmission of SIGRADUR® glassy carbon is advantageous for X-ray lithography. SIGRADUR® glassy carbon wafers can also be used as substrate materials for X-ray masks.